The high-precision measurement is carried out over the entire surface and wavefront deformation of flat, spherical, cylindrical, toric and aspherical components
µPhase® can be used universally for all surfaces with a reflectivity ranging from 0.2 % to 100 % made from materials such as glass, plastics, metal and ceramics
The objective digital measurement prevents operator influence. Likewise the robust and dustproof housing ensures high reliability.
Fast quality and functional testing as well as alignment of optical elements
Focusing and adjustment of surface reflectivity is possible (µPhase® 3.3 only)
Integration in manufacturing machines and production lines is possible
Motorized vertical z axis
Unique design for all types of reflection and transmission measurements
Integrated automatic radius measurement
Compact design with vertical measurement structure for small spaces
Optimal sample alignment due to integrated tilt and X-Y translation table
Modular design for optimization based on measurement requirements
Optional: Use of CGH for aspherical, toric or cylindrical surface measurements
Optional: Use of a tray holder and a motorized X-Y carriage for the automatic surface and radius measurement of many samples in one pass
Measurement of spherical, torical and aspherical lenses as well as samples made out of glass, plastik or metal
Highest reprecision for radii of up to 50 nm
Freely configurable and quickly exchangeable sample holder
Measurement range for diameters of up to 150 mm
Vibration insulation is usually not required since the unit has a solid granite base
Compact design and small footprint
Easy handling due to height-adjustable columns
Can also be used by untrained personnel due to its intuitive and easy handling
Measurement range for diameters of up to 100 mm
Compact design for small spaces, can be placed right next to the production machine
Samples are positioned at the top of the unit on a ring chuck or three-point support and measured from below
Vibration resistant
No intermediate realignment is required for serial measurements
Can also be used by untrained personnel due to its intuitive and easy handling
Measurement range for diameters of up to 50 mm
Compact design for small spaces, can be placed right next to the production machine
Samples are positioned at the top of the unit on a ring chuck or three-point support and measured from below
Vibration resistant
No intermediate realignment is required for serial measurements
Can also be used by untrained personnel due to its intuitive and easy handling
Measurement of flat and spherical samples
Compact table top stand for vertical measurements with small footprint
Optimal sample alignment with integrated tip/tilt and xy translation stage
Vertical axis with rough and fine regulation for high-precision adjustment
Optional: digital measurement unit for radius
Horizontal structure for the measurement of long radii
Compatible with other conventional 4-inch lenses
Optional CGH bracket for the measurement of aspheres, cylinders or toric surfaces
MTF and homogeneity measurements on request
Customized solutions for special applications can be implemented based on standard components
Development of additional customized components and software modules
µPhase® interferometers enable the following measurements and applications:
With the freely configurable µShape software in the current version 8, µPhase® is ideally equipped for use in both production as well as research and development. The software controls the measurement, provides comprehensive options for analysis and offers full documentation. Measurement templates provide maximum transparency about the measurement process and permit the quick documentation of test results.
The clearly structured, menu-based user interface of µShape always complies with the comprehensive use of µPhase® and can be expanded in many different ways via the available modules. These modules can be added at any time, even after purchasing the µPhase® system.
The µShape software was developed primarily for µPhase® operation but can also be used for operating laboratory and workshop interferometers from other manufacturers. The development of customized functions is possible.
| Parameter | µPhase® PLANO DOWN |
µPhase® PLANO UP |
µPhase® SPHERO UP |
µPhase® ST/ ST+R |
µPhase® VERTICAL |
µPhase® VERTICAL PRO |
µPhase® UNIVERSAL |
|---|---|---|---|---|---|---|---|
| Utilization | Production | Production | Production | R&D, Production | R&D, Production | Production Measurement in batches |
R&D |
| Sample type | Flat | Flat | Spherical | Flat Spherical |
Flat Spherical Toric Aspheric Cylindrical |
Spherical Toric Aspheric |
Flat Spherical Toric Aspheric Cylindrical |
| Sample size (measurement range) | Different versions up to max. Ø 150 mm |
Different versions up to max. Ø 150 mm |
Sample size depending on measurement objective (Measurement objective as link to the overview from the brochure page 16 + 17 |
Max. Ø50 mm Sample size depending on version and test lens (Measurement objective as link to the overview from the brochure page 16 + 17) |
Max. Ø 100 mm Sample size depending on measurement objective (Measurement objective as link to the overview from the brochure page 16 + 17) |
Ideal for small diameters | Max. Ø 150 mm Sample size depending on version and test lens (Measurement objective as link to the overview from the brochure page 16 + 17) |
| Max. sample weight | 5 kg | 1.5 kg (depending onconfiguration) |
1.5 kg (depending on configuration) |
1.5 kg | 1.5 kg | 1.5 kg | 1.5 kg |
| Alignment tools | Manual tilt | Manual tilt | Manual XY adjustment, tilt table and z-focusing (a few mm) | Manual XY adjustment, tilt table and Z-focusing |
Manual tilt table Manual XY table Motorized, computer-controlled Z-axis |
Motorized, computer-controlled X/Y/Z-axis | Manual tilt table Manual XY table Manual Z-axis |
| Test range radii measurement | Not available | Not available | Typically 10 mm ... 200 mm Relative radius measurement compared to a radius normal, range depends on test objective and holder |
Approx. 220 mm Absolute radius measurement with gauge (analog or digital) |
Approx. 300 mm Integrated, automated absolute radius measurement |
Max. 50 mm Integrated, automated absolute radius measurement |
Up to 2 m, depending on test objective and length of the radii measuring rail Integrated absolute radius measurement especially for long radii |
| Accuracy radius measurement | - | - | Depends on the accuracy of the radius normal | Depends on gauge: 0,5-5 µm |
Depends on gauge: 0,1-5 µm |
±0.1 µm | 30 µm |
| Dimensions (h x w x d) |
Base: S: 300 x 300 mm² (free working distance 180 x 180 mm²) L: 440 x 440 mm² (free working distance 330 x 330 mm²) Free working height : 110 mm / 155 mm / 200 mm |
500 x 200 x 200 mm³ | 500 x 200 x 200 mm³ | 500 x 300 x 400 mm³ moving range between 160-300 mm (depends on configuration) |
830 x 350 x 420 mm³ | 350 x 530 x 750 mm³ | 500 x 2500 x 400 mm³ (width depends on length of the rail) |
| Weight | S: 25 kg L: 45 kg | 5 kg ... 20 kg (depends on configuration) | 5 kg ... 20 kg (depends on configuration) | 20 kg | 55 kg | 100 kg | 30 kg (depends on configuration) |
| Type | Table top device | Table top device | Table top device | Table top device | Table top device | Table top device | Table top device |
| Options | Transmission measurement | CGH bracket for measurements of aspheres, cylinder or toric surfaces MTF measurements Transmission measurement |
CGH bracket for measurements of aspheres, cylinder or toric surfaces MTF measurements Transmission measurement |
| Parameter | µPhase® 3.1 | µPhase® 3.2 | µPhase® 3.3 | µPhase® 3.3 (FIZ) |
|---|---|---|---|---|
| Camera resolution | 608 x 608 pixels | 1216 x 1216 pixels | 1216 x 1216 pixels | 1216 x 1216 pixels |
| Reflection settings | Fixed setting, suitable for 4 % … 80 % |
Fixed setting, suitable for 4 % … 80 % |
0.5 %, 1 %, 4 %, 80 % | 0.0 %, 1 %, 4 %, 80 % |
| Measurement wavelength | 632.8 nm others on request |
632.8 nm, others on request |
632.8 nm, others on request |
632.8 nm, others on request |
| Focusing option | No | No | Yes | Yes |
| Dimensions (h x w x d) |
121 mm x 97 mm x 57 mm | 121 mm x 97 mm x 57 mm | 121 mm x 97 mm x 57 mm | 121 mm x 97 mm x 57 mm |
| Weight | 1,1 kg | 1,1 kg | 1,1 kg | 1,1 kg |
| Type | Twyman-Green phase-shifting interferometer | Twyman-Green phase-shifting interferometer | Twyman-Green phase-shifting interferometer | Twyman-Green phase-shifting interferometer convertable to Fizeau measurement mode |
| PV Repeatability | λ/400 | λ/400 | λ/400 | λ/400 |
| RMS Rep eatability | λ/1200 | λ/6500 | λ/6500 | λ/6500 |
| Measurement uncertainty with PC-based evaluation | λ/20 others on request |
λ/20 others on request |
λ/20 others on request |
λ/20 others on request |
The short coherence interferometer OptoFlat is specialized in the measurement of flat optics.
A Twyman-Green interferometer is a modified Michelson interferometer. Here the beam splitter is separated from the reference surface. The advantage of this configuration is greater flexibility, because both interferometer arms can be modified independently of each other. So the intensity of the reference and test arm can be easily adapted to each other depending on different sample reflectivities in order to get maximum fringe contrast. This increases the range of applications enormously. Only a maximum fringe contrast enables a maximum resolution in depth. The reference surface can be a surface that is inexpensive and accurately producible regardless of the sample size. The adaption to the sample size is done by conventional beam shaping optics introduced to the test arm. Contrary to the beam shaping optics for Fizeau interferometers these optics do not require an expensive Fizeau surface as a final surface.
As a consequence of this flexibility, the interference patterns are not caused by the sample errors only but also by the aberrations of the additional optics in the individual interferometer arms. However, nowadays samples are no longer evaluated by visual inspection of the fringe pattern but by computer controlled analysis of the phase map causing the fringe pattern. During this analysis the aberrations of the additional optics can easily be taken into account. Finally, the software provides an objective digital measurement result.
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Twyman-Green construction
Fizeau construction
The last surface of the beam shaping optics is the so called Fizeau surface. It has to have the same shape as the sample to be tested (commonly spherical or flat) and is placed concentrically into the optical path, so the individual rays intersect perpendicular to the Fizeau surface. The majority of the light passes the Fizeau surface and is reflected at the test surface. The returning light interferes with the part of the light reflected at the Fizeau surface. So the Fizeau surface acts as beam splitter as well as reference surface. So the cavity is formed by the gap between the Fizeau and the test surface containing no additional optics. That is the reason why a Fizeau interferogram commonly directly shows the deviations of the test sample from the reference surface, i.e. Fizeau surface. The quality of the Fizeau surface determines the accuracy of the Fizeau interferometer. Fizeau surfaces are commonly available with a quality of λ/10 – λ/20 PV, better on request.
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